'Smart Cut' Silicon by Proton Implantation: Lifetime Studies with a Pulsed Positron Beam

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Periodical:

Materials Science Forum (Volumes 363-365)

Edited by:

Werner Triftshäuser, Gottfried Kögel and Peter Sperr

Pages:

532-536

DOI:

10.4028/www.scientific.net/MSF.363-365.532

Citation:

P. Sperr et al., "'Smart Cut' Silicon by Proton Implantation: Lifetime Studies with a Pulsed Positron Beam", Materials Science Forum, Vols. 363-365, pp. 532-536, 2001

Online since:

April 2001

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$35.00

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