Plasma Oxidation of SiC at Low Temperatures (below 300°C)

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

1105-1108

DOI:

10.4028/www.scientific.net/MSF.389-393.1105

Citation:

M. Satoh et al., "Plasma Oxidation of SiC at Low Temperatures (below 300°C)", Materials Science Forum, Vols. 389-393, pp. 1105-1108, 2002

Online since:

April 2002

Keywords:

Export:

Price:

$35.00

In order to see related information, you need to Login.