Influence of Epitaxial Layer on SiC Schottky Diode Gas Sensors Operated under High-Temperature Conditions

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

1423-1426

DOI:

10.4028/www.scientific.net/MSF.389-393.1423

Citation:

S. Nakagomi et al., "Influence of Epitaxial Layer on SiC Schottky Diode Gas Sensors Operated under High-Temperature Conditions", Materials Science Forum, Vols. 389-393, pp. 1423-1426, 2002

Online since:

April 2002

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