Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum

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Periodical:

Materials Science Forum (Volumes 408-412)

Edited by:

Dong Nyung Lee

Pages:

1615-1620

Citation:

C. A. Michaluk et al., "Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum", Materials Science Forum, Vols. 408-412, pp. 1615-1620, 2002

Online since:

August 2002

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$38.00

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