Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors

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Periodical:

Materials Science Forum (Volumes 414-415)

Edited by:

J. Gyulai

Pages:

69-74

Citation:

H. Csorbai et al., "Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors", Materials Science Forum, Vols. 414-415, pp. 69-74, 2003

Online since:

January 2003

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DOI: https://doi.org/10.1147/rd.165.0523

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