4H-SiC Epitaxial Growth for High-Power Devices

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Materials Science Forum (Volumes 433-436)

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Peder Bergman and Erik Janzén

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131-136

Citation:

H. Tsuchida et al., "4H-SiC Epitaxial Growth for High-Power Devices", Materials Science Forum, Vols. 433-436, pp. 131-136, 2003

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September 2003

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[1] Y. Sugawara, D. Takayama, K. Asano, R. Singh, J. Palmour and T. Hayashi: Proc. of 2001 Inter. Symp. on Power Semic. Dev. and ICs (June 4-7, 2001, Osaka, Japan), p.27.

[2] H. Lendenmann, F. Dahlquist, J.P. Bergman, H. Bleichner and C. Hallin: Mater. Sci. Forum Vol. 389-393 (2002), p.1259.

DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.1259

[3] O. Kordina, C. Hallin, A. Henry, J.P. Bergman, I. Ivanov, A. Ellison, N.T. Son, and E. Janzén: Phys. Stat. Sol. (b) Vol. 202 (1997), p.321.

[4] T. Kimoto, S. Nakazawa, K. Hashimoto and H. Matsunami: Appl. Phys. Lett. Vol. 79 (2001), p.2761.

[5] A. Ellison, J. Zhang, W. Magnusson, A. Henry, Q. Wahab, J.P. Bergman, C. Hemmingsson, N.T. Son, and E. Janzén: J. Cryst. Growth Vol. 236 (2002), p.225.

[6] K. Fujihira, T. Kimoto and H. Matsunami: Mater. Sci. For. Vol. 389-393 (2002), p.175.

[7] H. Tsuchida, I. Kamata, T. Jikimoto and K. Izumi: J. Cryst. Growth Vol. 237-239 (2002), p.1206.

[8] A.A. Burk Jr., M.J. O'Loughlin, and H.D. Nordby Jr.: J. Cryst. Growth Vol. 200 (1999), p.458.

[9] R. Rupp, C. Hecht, A. Wiedenhofer and D. Stephani: Mater. Res. Soc. Symp. Proc. Vol. 572 (1999), p.149.

[10] J. Zhang, U. Forsberg, M. Isaxson, A. Ellison, A. Henry, O. Kordina and E. Janzén: Mater. Sci. Forum Vol. 389-393 (2002), p.1259.

[11] I. Kamata, H. Tsuchida, T. Jikimoto and K. Izumi: submitted to Jpn. J. Appl. Phys.

[12] R. Yakimova, M. Syväjärvi, S. Rendakova, V.A. Dimitriev, A. Henry and E. Janzén: Mater. Sci. Forum Vol. 338-342 (2000), p.237.

[13] H. Tsuchida, I. Kamata and K. Izumi: submitted to Jpn. J. Appl. Phys.

[14] D.J. Larkin: Phys. stat. sol. (b) Vol. 202 (1997), p.305.

[15] H. Tsuchida, I. Kamata, T. Jikimoto and K. Izumi: Mater. Sci. Forum, Mater. Sci. Forum Vol. 389-393 (2002), p.171.

[16] H. Tsuchida, I. Kamata, T. Jikimoto and K. Izumi: Mater. Res. Soc. Symp. Proc. Vol. 640 (2001), H2. 12. 1.

[17] T. Kimoto, N. Miyamoto and H. Matsunami: IEEE Trans. on Electr. Dev. Vol. 46 (1999), p.471.

[18] Q. Wahab. A. Ellison, A. Henry and E. Janzén: Appl. Phys. Lett. Vol. 76 (2000), p.2725.

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