Predictions of Nitrogen Doping in SiC Epitaxial Layers

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Materials Science Forum (Volumes 433-436)

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Peder Bergman and Erik Janzén

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137-140

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Ö. Danielsson et al., "Predictions of Nitrogen Doping in SiC Epitaxial Layers", Materials Science Forum, Vols. 433-436, pp. 137-140, 2003

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September 2003

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DOI: https://doi.org/10.1016/s0010-2180(00)00228-5

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