Nitrogen Delta Doping in 4H-SiC Epilayers


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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén




A. Henry et al., "Nitrogen Delta Doping in 4H-SiC Epilayers", Materials Science Forum, Vols. 433-436, pp. 153-156, 2003

Online since:

September 2003




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