Characterization of Homoepitaxial 4H-SiC Layer Grown from Silane/Propane System


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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén




C. Sartel et al., "Characterization of Homoepitaxial 4H-SiC Layer Grown from Silane/Propane System", Materials Science Forum, Vols. 433-436, pp. 165-168, 2003

Online since:

September 2003




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