Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes


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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén




G. Melnychuck et al., "Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes", Materials Science Forum, Vols. 433-436, pp. 177-180, 2003

Online since:

September 2003




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