Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes

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Materials Science Forum (Volumes 433-436)

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Peder Bergman and Erik Janzén

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177-180

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G. Melnychuck et al., "Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes", Materials Science Forum, Vols. 433-436, pp. 177-180, 2003

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September 2003

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