HTCVD Grown Semi-Insulating SiC Substrates

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Materials Science Forum (Volumes 433-436)

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Peder Bergman and Erik Janzén

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33-38

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A. Ellison et al., "HTCVD Grown Semi-Insulating SiC Substrates", Materials Science Forum, Vols. 433-436, pp. 33-38, 2003

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September 2003

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