Deep Levels in As-Grown 4H-SiC Epitaxial Layers and their Correlation with CVD Parameters

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Materials Science Forum (Volumes 433-436)

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Peder Bergman and Erik Janzén

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463-466

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I. Pintilie et al., "Deep Levels in As-Grown 4H-SiC Epitaxial Layers and their Correlation with CVD Parameters", Materials Science Forum, Vols. 433-436, pp. 463-466, 2003

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September 2003

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