Phosphorus-Related Shallow and Deep Defects in 6H-SiC

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

503-506

Citation:

P.G. Baranov et al., "Phosphorus-Related Shallow and Deep Defects in 6H-SiC", Materials Science Forum, Vols. 433-436, pp. 503-506, 2003

Online since:

September 2003

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DOI: https://doi.org/10.1063/1.363325

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