Effects of Initial Nitridation on the Characteristics of SiC-SiO2 Interfaces

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

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583-586

DOI:

10.4028/www.scientific.net/MSF.433-436.583

Citation:

K.Y. Cheong et al., "Effects of Initial Nitridation on the Characteristics of SiC-SiO2 Interfaces", Materials Science Forum, Vols. 433-436, pp. 583-586, 2003

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September 2003

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