Effect of Tantalum in Sublimation Growth of Aluminum Nitride


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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén




T. Furusho et al., "Effect of Tantalum in Sublimation Growth of Aluminum Nitride", Materials Science Forum, Vols. 433-436, pp. 975-978, 2003

Online since:

September 2003




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DOI: https://doi.org/10.1103/physrevb.58.12899

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