X-Ray Scattering from Thin Films and Multilayers
Capability of the X-ray scattering for study of low-dimensional structures is illustrated on few examples. They are focused to the phase analysis, residual stress measurement, calculation of the stress-free lattice parameters, investigation of the anisotropic lattice deformation and preferred orientation in UN thin films. Further, the study of concentration profiles in functionally graded hard-metals and investigation of the multilayer degradation caused by soft annealing are discussed.
Yvonne Andersson, Eric J. Mittemeijer and Udo Welzel
D. Rafaja, "X-Ray Scattering from Thin Films and Multilayers", Materials Science Forum, Vols. 443-444, pp. 65-70, 2004