Positron Beam Study of Defects Induced in Ar-Implanted Si

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Materials Science Forum (Volumes 445-446)

Edited by:

Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito

Pages:

150-152

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T. Miyagoe et al., "Positron Beam Study of Defects Induced in Ar-Implanted Si", Materials Science Forum, Vols. 445-446, pp. 150-152, 2004

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January 2004

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