Defect Characterization of the Structure-Growth Zone-Model for Sputter Deposited Cu Films

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Periodical:

Materials Science Forum (Volumes 445-446)

Edited by:

Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito

Pages:

69-71

Citation:

J. De Baerdemaeker et al., "Defect Characterization of the Structure-Growth Zone-Model for Sputter Deposited Cu Films", Materials Science Forum, Vols. 445-446, pp. 69-71, 2004

Online since:

January 2004

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DOI: https://doi.org/10.1103/physrevb.65.094106

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