Novel fabrication routes of oxide/semiconducting hybrid nanotubes or coaxial nanocables with 30~200 nanometers of radius and ~10 micrometers of length using atomic layer deposition (ALD) and soluble nano-templates was reported. In order to fabricate the hybrid nanotubes using nanotemplates, which were treated with surface modification using SAMs in order to achieve selective deposition only onto inner wall of the template. Deposition of metal oxide layers (TiO2, ZrO2) conformally and uniformly onto the wall of templates using ALD. To fabricate metal oxide/CdS nanocables or coaxial nanotubes, CdS was deposited onto metal oxide nanotubes by chemical bath deposition. Coaxial nanocables was also 30-200 nm in diameter and 1-10 in lengths.