Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer
Aerosol deposition method (ADM) for shock-consolidation of fine ceramics powder to form dense and hard layers is reported. Submicron ceramic particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed thick (10 ~ 100 µm), dense, uniform and hard ceramics layers. Depositions were fulfilled at room temperature. Every layer has polycrystalline structure with nano-meter order scale. The results of fabrications, microstructure, mechanical and electrical properties of oxides (α-Al2O3; Pb(Zr0.52,Ti0.48)O3 etc.) and non-oxides materials are presented.
S.-G. Kang and T. Kobayashi
J. Akedo "Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer", Materials Science Forum, Vols. 449-452, pp. 43-48, 2004