Fabrication of CdS Thin Film Pattern by CBD Method Using the Self-Assembled Monolayer
Microcontact printing of hydrophobic OTS (Octadecyl-Trichloro-Silane) material was made on various substrates, and finely patterned CdS thin film has been fabricated by CBD (Chemical Bath Deposition) method. In the preliminary experiment, it is confirmed that the size of colloid particle and roughness of surface of CdS thin film are increased with increase of pH, fabrication time and temperature. The optimum condition for the selective deposition of CdS film pattern using the SAM with microcontact printing was determined to be pH 10, temperature of 75°C, deposition time of 15 minute. Various patterns of different shape of CdS thin film were fabricated uniformly and satisfactorily in large area by the conditions determined in the present work. The stoichiometric composition of CdS was confirmed to be 1:1 by EDS and XPS.
S.-G. Kang and T. Kobayashi
S.-H. Jung et al., "Fabrication of CdS Thin Film Pattern by CBD Method Using the Self-Assembled Monolayer", Materials Science Forum, Vols. 449-452, pp. 449-452, 2004