Structural and Optical Features of Si-Rich SiO2 Films Prepared by Magnetron Sputter Techniques

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Si-rich SiO2 (SRSO) films were prepared by RF magnetron sputter techniques, and the structural and optical features of nanocrystalline Si (nc-Si) embedded in the SiO2matrix were investigated in terms of post-deposition heat-treatment conditions. The SRSO thin films exhibited PL phenomena in the wavelength range of (450 ~ 500 nm). Post-deposition heattreatment at relatively high temperature like 1000 ~ 1100 °C increased the crystallinity of the films as well as the volume of the Si nanocrystallites (and SiO2), and as a result, PL intensity was enhanced in the visible light region. The nc-Si embedded in SiO2matrix is a few nanometers in size. It is believed that the Si nanocrystallites in the post-deposition annealed films are isolated and well passivated by SiO2.

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Periodical:

Materials Science Forum (Volumes 449-452)

Edited by:

S.-G. Kang and T. Kobayashi

Pages:

949-952

Citation:

S. W. Kim et al., "Structural and Optical Features of Si-Rich SiO2 Films Prepared by Magnetron Sputter Techniques", Materials Science Forum, Vols. 449-452, pp. 949-952, 2004

Online since:

March 2004

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[1] L.T. Canham: Appl. Phys. Lett. Vol. 57 (1990), p.1046.

[2] P. Mutti, G. Ghislotti, S. Bertoni, L. Bonoldi, G.F. Cerofolini, L. Meda, E. Grilli and M. Guzzi: Appl. Phys. Lett. Vol. 66 (1995), p.851.

DOI: https://doi.org/10.1063/1.113408

[3] A. Madn and M. Shaw: The Physics and Applications of Amorphous Semiconductors (Academic Press, San Diego 1988).

[4] Y. Hamakawa: Current Topics in Amorphous Materials-Physics and Technology (Elsevier, Amsterdam 1993).

[5] D.J. Lockwood, Z.H. Lu and J. –M. Baribeau: Phys. Rev. Lett. Vol. 76 (1996), p.539.

[6] O. Schoenfeld, X. Zhao, J. Christen, T. Hempel, S. Nomura and Y. Aoyagi: Solid State Electron. Vol. 40 (1996), p.605.

[7] J.F. Moulder, W.F. Stickle, P.E. Sobol and K.D. Bomben: Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Minnesota 1992), p.56.

[8] R.A. Nyquist and R.O. Kagel: The Handbook of Infrared and Raman Sectra of Inorganic Compouds and Organic Salts Vol 4 (Academic Press, Sand Diego 1971), p.126.

[9] D.V. Tsu, G. Lucovsky and B.N. Davidson: Phys. Rev. B Vol. 40 (1998), p.1795 Fig. 6 PL spectra of the films; the samples annealed at (a) 600, (b) 900, (c) 1000, and (d) 1100� , respectively.