Annealing Temperature Effect of PbZr0.4Ti0.6O3 Film on La1/2Sr1/2CoO3 Bottom Electrode
We have investigated the ferroelectric and electrical properties of PZT 40/60 films on the bottom La1/2Sr1/2CoO3(LSCO) electrode. The LSCO bottom electrode was sputtered on the SiO2/Si(100). As the annealing temperature of PZT capacitors on the LSCO is increased, the ferroelectric properties gradually increase with the annealing temperature up to 650°C. However, for the PZT capacitors annealed above 650°C, electrical measurement cannot be performed.
S.-G. Kang and T. Kobayashi
J. H. Kim et al., "Annealing Temperature Effect of PbZr0.4Ti0.6O3 Film on La1/2Sr1/2CoO3 Bottom Electrode ", Materials Science Forum, Vols. 449-452, pp. 957-960, 2004