Annealing Temperature Effect of PbZr0.4Ti0.6O3 Film on La1/2Sr1/2CoO3 Bottom Electrode

Abstract:

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We have investigated the ferroelectric and electrical properties of PZT 40/60 films on the bottom La1/2Sr1/2CoO3(LSCO) electrode. The LSCO bottom electrode was sputtered on the SiO2/Si(100). As the annealing temperature of PZT capacitors on the LSCO is increased, the ferroelectric properties gradually increase with the annealing temperature up to 650°C. However, for the PZT capacitors annealed above 650°C, electrical measurement cannot be performed.

Info:

Periodical:

Materials Science Forum (Volumes 449-452)

Edited by:

S.-G. Kang and T. Kobayashi

Pages:

957-960

DOI:

10.4028/www.scientific.net/MSF.449-452.957

Citation:

J. H. Kim et al., "Annealing Temperature Effect of PbZr0.4Ti0.6O3 Film on La1/2Sr1/2CoO3 Bottom Electrode ", Materials Science Forum, Vols. 449-452, pp. 957-960, 2004

Online since:

March 2004

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$35.00

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