Electrical/Optical Properties of Thin Transparent Oxide Films Deposited Using DC Magnetron Sputtering

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Amorphous indium tin oxide (ITO) thin films were grown on plastic substrates, PES (polyethersulfone) using low temperature DC magnetron sputtering. Various post-annealing techniques are attempted to optimize conductivity, transmittance, and roughness: i) conventional thermal annealing, ii) excimer laser annealing, and iii) UV irradiation. The electrical/optical properties were measured using Hall-measurement, DC 4-point resistance measurement, and UV spectrometry along with micro-structural characterization. Optimized UV treatment exhibits enhanced conductivity and smooth surface, compared to those of conventional thermal annealing and excimer laser annealing.

Info:

Periodical:

Materials Science Forum (Volumes 449-452)

Edited by:

S.-G. Kang and T. Kobayashi

Pages:

989-992

Citation:

B. S. So et al., "Electrical/Optical Properties of Thin Transparent Oxide Films Deposited Using DC Magnetron Sputtering", Materials Science Forum, Vols. 449-452, pp. 989-992, 2004

Online since:

March 2004

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$38.00

[1] C.W. Tang and S. A. Slyke: Appl. Phys. Lett. Vol 51 (1987), p.913.

[2] D. C. Paine, T. Whitson, D. Janiac, R. Beresford and C. O. Yang: J. Appl. Phys. Vol. 85(12) (1999), p.8445.

[3] H. Morikawa, H. Sumi and M. Kohyama: Thin Solid Films Vol. 281-2 (1996), p.202.

[4] M. Kamei, Y. Shigesato and S. Takaki: Thin Solid Films Vol. 259 (1995), p.38.

[5] R. Chandrasekhar and K. L. Choy: Thin Solid Films Vol. 398-399 (2001) p.59.

[6] S. E. Dyer, O. J. Gregory, P. S. Amons and A. Bruins Dolt: Thin Solid Films Vol. 288 (1996), p.279.

[7] H. Morikawa and M. Fujita: Thin Solid Films Vol. 339 (1999), p.309.

[8] T. Minami, H. Sonohara, T. Kakumu and S. Takata: Thin Solid Films Vol. 270 (1995), p.37.

[9] H. Hosono, M. Kurita and H. Kawazoe: Thin Solid Films Vol. 315 (1999) p.137.

[10] S. H. Keshmiri, M. Rezaee and S. Ashok: Thin Solid Films Vol. 413, (2002) p.167.

[11] I. Hamberg and C. G. Graqvist: J. Appl. Phys. Vol. 60 (1986) p. R123.

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