Data Bases for Modeling Plasma Devices for Processing of Integrated Circuits

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Materials Science Forum (Volumes 453-454)

Edited by:

Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic

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15-20

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Ž. Nikitović et al., "Data Bases for Modeling Plasma Devices for Processing of Integrated Circuits ", Materials Science Forum, Vols. 453-454, pp. 15-20, 2004

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May 2004

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