Influence of the Rapid Thermal Annealing on the Properties of Thin a-Si Films

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Periodical:

Materials Science Forum (Volumes 455-456)

Edited by:

Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias

Pages:

108-111

Citation:

N. Nedev et al., "Influence of the Rapid Thermal Annealing on the Properties of Thin a-Si Films", Materials Science Forum, Vols. 455-456, pp. 108-111, 2004

Online since:

May 2004

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