The Use of Thin Silicon Films in Flat Panel Displays


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Materials Science Forum (Volumes 455-456)

Edited by:

Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias




D. Pribat, "The Use of Thin Silicon Films in Flat Panel Displays", Materials Science Forum, Vols. 455-456, pp. 56-63, 2004

Online since:

May 2004





[1] O. Heil: British Patent 439 457, December (1935).

[2] K. Weimer: Proc. IRE Vol. 50 (1962), p.1462.

[3] P. Brody and H.E. Kunig: Appl. Phys. Lett. Vol. 9 (1966), p.259.

[4] P. Brody and D.J. Page: Government Microcircuit Applications Conf. Digest, (1969), p.92.

[5] J. Lechner, F.J. Marlowe, E.O. Nester, and J. Tults: Proc. IEEE Vol. 59, (1971). P. 1566.


[6] The principle of twisted nematic (TN) liquid crystal displays was first described in: M. Schad and W. Helfrich, Appl. Phys. Lett., Vol. 18, (1971).

[7] S. Soh: SID 2002 Seminar Lecture Notes, Seminar M4: AMLCD Manufacturing Technology.

[8] S. Kim: Information Displays Vol. 17, No 8 (2002), p.22.

[9] H. Souk and N.D. Kim: SID '02 Digest, (2002), p.1277.

[10] W. Kim, Y.B. Park, H.S. Kong, D.G. Kim, S.J. Kang, J.W. Jang, and S.S. Kim: SID '00 Digest (2000), p.1006.

[11] H. Lee, B.S. Cho, B.J. Kang, H.J. Yang, J.G. Lee, I.K. Woo, S.W. Lee, J. Jang, G.S. Chae, and H.S. Soe: Appl. Phys. Lett. Vol. 79, (2001), p.3962.

[12] H. Kim and J.H. Souk: Proc. 19th Internat. Display Research Conference, (1999), p.115.

[13] Kumagawa, A. Takimoto, and H. Wakemoto: SID '02 Digest (2002), p.1288.

[14] Furuhashi, K. Kawabe, J-I Hirakata, Y. Tanaka, T. Sato: SID '02 Digest (2002), p.1284.

[15] .H. Lowndes, S.J. Pennycook, G.E. Jellison, S.P. Withrow, and D.N. Mashburn: J. Mater. Res., Vol. 2 (1987), p.648.

[16] .R. Stiffler, M.O. Thomson, and P.S. Percy: Phys. Rev. Lett., Vol. 60 (1988), p.2519.

[17] .S. Im and H.J. Kim: Appl. Phys. Lett., Vol. 64 (1994), p.2303.

[18] Pribat, P. Legagneux, F. Plais, C. Reita, F. Petinot, and O. Huet: Mat. Res. Soc. Symp. Proc. Vol. 424 (1997), p.127.


[19] Legagneux, F. Petinot, O. Huet, F. Plais, C. Reita, D. Pribat, R. Carluccio, A. Peccora, L. Mariucci, and G. Fortunato: Proc. of the 1996 ESSDERC, Eds. G. Baccarani and M. Rudan, Editions Frontières (1996), p.1071.


[20] Pribat, P. Legagneux, C. Collet, F. Plais, O. Huet, and, C. Reita,: Proc. AMLCD’98 (1998) p.9.

[21] Legagneux, C. Collet, and D. Pribat: French Patent Application No 98 08556, deposited on July 3 rd, (1998).

[22] S. Brotherton: presented at the SID Mid-Europe Chapter Conference, Rome, March (2001).

[23] J.S. Im and R. S. Sposili: MRS Bulletin, Vol. 21, No 3 (1996), p.39.

[24] Dassow, J.R. Kohler, M. Nerding, HP. Strunk, Y. Helen, K. Mourgues, O. Bonnaud, T. Mohammed-Brahim, and JH. Werner: Mat. Res. Soc. Symp. Proc. Vol 21, (2000), Q9. 3. 1.


[25] Matsumura: Proceedings of IDW’02 (2002), p.263.

[26] Takeuchi, A. Hara, and N. Sasaki: Proceedings of IDMC ’02 (2002), p.73.

[27] M. Ha: SID’00 Digest (2000), p.1116.

[28] K. Kim, K.J. Kim, K.C. Ahn, H.S. Choi, and Y.M. Ha: Proc. of IDMC ’02 (2002), p.69.

[29] W. Tang and S.A. van Slyke: Appl. Phys. Lett. Vol. 51 (1987), 913.

[30] H. Burroughes, D.D.C. Bradley, A.R. Brown, R.N. Marks, K. Mackey, R.H. Friend, P.L. Burn, and A.B. Holmes: Nature, Vol. 347, (1990), p.539.

[31] D. Pribat and F. Plais: Solid State Phenomena Vol. 80-81 (2001), p.385.

[32] J.H. Kim, D. Lee, and J. Kanicki: Eurodisplay 2002, (2002), p.601.

[33] M.J. Powell, C.V. Berkel, and J.R. Hughes: Appl. Phys. Lett. Vol. 54 (1989), p.323.

[34] T. van de Biggelaar, I. Camps, M. Childs, M. Fleuster, A. Giraldo, S. Godfrey, I.M. Hunter, M.T. Johnson, H. Lifka, R. Los, A. Sempel, J. M. Shannon, M.J. Trainor, R. W. Wilks, and N. Young: Proceedings of SPIE, Vol. 4295 (2001), p.134.