Thermal Oxidation of 4H-Silicon Using the Afterglow Method


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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet




A.M. Hoff et al., "Thermal Oxidation of 4H-Silicon Using the Afterglow Method", Materials Science Forum, Vols. 457-460, pp. 1349-1352, 2004

Online since:

June 2004




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