Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1357-1360

DOI:

10.4028/www.scientific.net/MSF.457-460.1357

Citation:

A. Poggi et al., "Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation", Materials Science Forum, Vols. 457-460, pp. 1357-1360, 2004

Online since:

June 2004

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$35.00

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