Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1515-1518

DOI:

10.4028/www.scientific.net/MSF.457-460.1515

Citation:

D. Panknin et al., "Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation", Materials Science Forum, Vols. 457-460, pp. 1515-1518, 2004

Online since:

June 2004

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$35.00

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