Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation


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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet




D. Panknin et al., "Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation", Materials Science Forum, Vols. 457-460, pp. 1515-1518, 2004

Online since:

June 2004




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