Growth of SiC Films using Tetraethylsilane

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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269-272

Citation:

N. Kubo et al., "Growth of SiC Films using Tetraethylsilane", Materials Science Forum, Vols. 457-460, pp. 269-272, 2004

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June 2004

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