Stress Control in 3C-SiC Films Grown on Si(111)

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

301-304

DOI:

10.4028/www.scientific.net/MSF.457-460.301

Citation:

C. Zgheib et al., "Stress Control in 3C-SiC Films Grown on Si(111)", Materials Science Forum, Vols. 457-460, pp. 301-304, 2004

Online since:

June 2004

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Price:

$35.00

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