Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

313-316

DOI:

10.4028/www.scientific.net/MSF.457-460.313

Citation:

G. Ferro et al., "Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers ", Materials Science Forum, Vols. 457-460, pp. 313-316, 2004

Online since:

June 2004

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$35.00

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