Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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313-316

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G. Ferro et al., "Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers ", Materials Science Forum, Vols. 457-460, pp. 313-316, 2004

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June 2004

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[1] L. Falkovski, J.M. Bluet and J. Camassel, Phys. Rev. B Vol. 57 (1998), p.11283.

[2] G. Ferro, C. Balloud, S. Juillaguet, P. Vicente, J. Camassel and Y. Monteil, Mater. Sci. Forum vols. 433-436 (2003) p.115.

DOI: https://doi.org/10.4028/www.scientific.net/msf.433-436.115

[3] http/www. hoya. co. jp/eng/news.

[4] H. Nagasawa, K. Yagi, T. Kawahara, J. Crystal Growth, Vol. 237 (2002) p.1244.

[5] D. Panknin, J. Stoemenos, M. Eickhoff, V. Heera, N. Vouroutzis, G. Krötz, W. Skorupa, Mat. Sci. Forum, Vol. 353-356 (2001) p.151.

DOI: https://doi.org/10.4028/www.scientific.net/msf.353-356.151

[6] T. Chassagne, G. Ferro, D. Chaussende, F. Cauwet, Y. Monteil and J. Bouix, Thin Solid Films Vol. 402 (2002) p.83.

DOI: https://doi.org/10.1016/s0040-6090(01)01597-8

[7] G. Ferro, V. Thévenot, H. Vincent, Y. Monteil and J. Bouix, Proc. Conf. EUROCVD 11, (1997) p.1409.

[8] E. Niemann, D. Panknin , W. Skorupa, and H. Wirth, Patent No 19808246. 0.

[9] W. J. Choyke, Z. C. Feng, J. A. Powell, J. Appl. Phys. Vol. 64 (1988), p.316 Fig. 4. LTPL spectra collected at 5 K on 3 µm SiC film deposited on different samples: a 3µm-thick reference sample, a FLASIC sample and a bulk-like 3C-SiC material.