Defects in He+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

493-496

DOI:

10.4028/www.scientific.net/MSF.457-460.493

Citation:

A. Ruggiero et al., "Defects in He+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements", Materials Science Forum, Vols. 457-460, pp. 493-496, 2004

Online since:

June 2004

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$35.00

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