Residual Stresses and Stacking Faults in n-Type 4H-SiC Epilayers

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

529-532

DOI:

10.4028/www.scientific.net/MSF.457-460.529

Citation:

R. S. Okojie et al., "Residual Stresses and Stacking Faults in n-Type 4H-SiC Epilayers ", Materials Science Forum, Vols. 457-460, pp. 529-532, 2004

Online since:

June 2004

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$35.00

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