Optical Characterization of Full SiC Wafer


Article Preview



Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet




I. El Harrouni et al., "Optical Characterization of Full SiC Wafer", Materials Science Forum, Vols. 457-460, pp. 593-596, 2004

Online since:

June 2004




[1] M. Mermoux, A. Crisci and F. Baillet: Mater. Sci. Forum Vol. 433-436 (2003), p.353.

[2] S. Nakashima and H Harima: Phys. Stat. Sol. (a) Vol. 162 (1997), p.39.

[3] H. Yaguchi, K. Narita, Y. Hijikata, S. Yoshida, S. Nakashima and N. Oyanagi: Mater. Sci. Forum Vol. 389-393 (2002), p.621.

DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.621

[4] I.G. Ivanov, C. Hallin, A. Henry, O. Kordina and E. Janzen: J. Appl. Phys. Vol. 80 (1996), p.3504.

[5] A. Henry, A. Ellison, U. Forsberg, B. Magnusson, G. Pozina and E. Janzen: Mater. Sci. Forum Vol. 389-393 (2002), p.593.

[6] R. Weingärtner, P.J. Wellmann, M. Bickermann, D. Hofmann, T.L. Straubinger and A. Winnacker : Appl. Phys. Letter Vol. 80 (2002), p.70.

[7] L. Masarotto, J.M. Bluet, I. El Harrouni and G. Guillot, ECSCRM2002, Mater. Sci. Forum Vol. 433-436 (2003), p.349.

[8] A. Galeckas, J. Linnros, V. Grivickas, U. Lindelfelt and C. Hallin: Mater. Sci. Forum Vol. 264268 (1998), p.533.

[9] W. Gerlach, H. Schlangenotto and H. Maeder: Phys. Stat. Solidi A Vol. 13, 1, (1972), p.277.

[10] S.G. Sridhara, T.J. Eperjesi, R. P. Devaty and W.J. Choyke: Mat. Science For. 338-342, (2000), p.551.

[11] K. Schneider and L. Helbig: Mater. Sci. Forum Vol. 389-393 (2002).