Dilute Aluminium Concentration in 4H-SiC: from SIMS to LTPL Measurements

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

775-778

DOI:

10.4028/www.scientific.net/MSF.457-460.775

Citation:

S. Juillaguet et al., "Dilute Aluminium Concentration in 4H-SiC: from SIMS to LTPL Measurements", Materials Science Forum, Vols. 457-460, pp. 775-778, 2004

Online since:

June 2004

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$35.00

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