Dilute Aluminium Concentration in 4H-SiC: from SIMS to LTPL Measurements

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

775-778

Citation:

S. Juillaguet et al., "Dilute Aluminium Concentration in 4H-SiC: from SIMS to LTPL Measurements", Materials Science Forum, Vols. 457-460, pp. 775-778, 2004

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June 2004

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DOI: https://doi.org/10.1063/1.109627

[5] C. Sartel et al : Paper ThP1-5, this conference.

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[7] L. Kasamakova-Kolaklieva et al: Paper TuP4-12, this conference. Fig. 4. Log-Log plot of the intensity ratio R vs aluminum concentration. Full triangles are experimental data, open stars below the SIMS detection limit. Triangles and square have been used to compute the solid line.

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