Dilute Aluminium Concentration in 4H-SiC: from SIMS to LTPL Measurements


Article Preview



Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet




S. Juillaguet et al., "Dilute Aluminium Concentration in 4H-SiC: from SIMS to LTPL Measurements", Materials Science Forum, Vols. 457-460, pp. 775-778, 2004

Online since:

June 2004




[1] R.P. Devaty and W.J. Choyke: Phys. Stat. Sol. (a) (1997), pp.162-5 and refs therein.

[2] A. Henry, A. Ellison, U. Forsberg, B. Magnussin, G. Pozina and E. Janzen: Mater. Scie. Forum Vol. 389-393 (2002), p.593.

[3] I.G. Ivanov, C. Hallin, A. Henry, O. Kordina and E. Janzen: J. Appl. Phys. 80 (6) (1996), p.3504.

[4] L.L. Clemen, R.P. Devaty, M.F. MacMillan, M. Yoganathan, W.J. Choyke, D.J. Larkin and J.A. Powel, J.A. Edmond, and H.S. Kong: App. Phys. Lett. 62 (1993), p.2953.

DOI: https://doi.org/10.1063/1.109627

[5] C. Sartel et al : Paper ThP1-5, this conference.

[6] J.L. Robert, S. Contreras, J. Camassel, J. Pernot,S. Juillaguet, L. Di Cioccio and T. Billon : Mater. Sci. Forum 389-393 (2002), p.1435.

[7] L. Kasamakova-Kolaklieva et al: Paper TuP4-12, this conference. Fig. 4. Log-Log plot of the intensity ratio R vs aluminum concentration. Full triangles are experimental data, open stars below the SIMS detection limit. Triangles and square have been used to compute the solid line.