Activation of Implanted Al and Co-Implanted Al/C or Al/Si in 4H-SiC


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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet




K. A. Jones et al., "Activation of Implanted Al and Co-Implanted Al/C or Al/Si in 4H-SiC", Materials Science Forum, Vols. 457-460, pp. 929-932, 2004

Online since:

June 2004




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