The Fabrication and Performance of CVD Diamond-Based X-Ray Detectors


Article Preview

In this study, X-ray detectors with coplanar metal-semiconductor-metal structure, were fabricated employing high quality chemical vapour deposited (CVD) diamond film grown by a direct current arc jet plasma system. In which the electrical contacts with dimension of 25 µm in width with a 25 µm inter-electrode spacing, were patterned on the growth side of the diamond film using lift-off technology. The performance of the fabricated detectors was evaluated by steady-state X-ray illumination. The photoconductivity of the diamond detectors was found to linearly increase with increase in the X-ray photon flux. This demonstrates that high quality CVD diamond can be used for X-ray detectors.



Materials Science Forum (Volumes 475-479)

Main Theme:

Edited by:

Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie




S.G. Wang et al., "The Fabrication and Performance of CVD Diamond-Based X-Ray Detectors", Materials Science Forum, Vols. 475-479, pp. 3605-3610, 2005

Online since:

January 2005




[1] S. F. Kozlov, E. A. Koronova, Y. A. Kuznetsov, Y. A. Salikov, V. I. Redko, V. R. Grinberg, M. L. Meilman, IEEE Trans. Nucl. Sci. NS-24 (1977), p.235.

[2] E.A. Burgemeister, Phys. Med. Biol. 26 (1981), p.269.

[3] S. Vatnitsky, H. Jarvinent, Phys. Med. Biol. 38 (1993), p.173.

[4] S. Han, R. S. Wagner, E. Gullikson, Nucl. Instr. and Meth. A 380 (1996), p.205.

[5] C. Manfredotti, F. Fizzotti, A. Lo Giudice, G. Mucera, P. Polesello, E. Vittone, Y. A. Mankelevich, N. V. Suetin, Diamond. Relat. Mater. 6 (1997), p.1051.


[6] R.E. Turner, O.L. Landen, P. Bell, R. Costa, D. Hargrove, Rebiew of Scientific Instruments 70 (1999), p.656.

[7] J. Krasa, L. Juha, V. Vorlicek, A. Cejnarova, Nucl. Instr. and Meth. A 524 (2004), p.332.

[8] P. K. Bachmann, in Handbook of industrial diamonds and diamond films, edited by M. A. Prelas, G. Popovici and L. K. Bigelow (Marcel Dekker, Inc. New York, 1998, p.829).

[9] G. Davies, M.F. Hamer, Proc. R. Soc. London, Ser. A348 (1976), p.285.

[10] A.T. Collins, S.C. Lawson, J. Phys. Condens. Mater. 1 (1989), p.6929.

[11] A.T. Collins, H. Kanda, J. Isoya, C.A.J. Ammerlaan, J.A. van Wyk, Diamond. Relat. Mater. 7 (1998), p.333.

[12] K. Lakoubovskii, Optical study of defects in diamond, PhD thesis, KU Leuven (2000).

[13] E.S. Rittner, in Photoconductivity Conference, edited by R.C. Breckenridge, p.215, Wiley, New York.

[14] D.R. Kania, A.E. Iverson, D.L. Smith, R.S. Wagner, R.B. Hammond, K.A. Stetler, J. Appl. Phys. 60 (1986), p.2596.