Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition
Diamond like carbon (DLC) films were prepared on Si wafer, using laser induced arc deposition (Laser arc) technique. Results of Raman Spectra analysis showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological properties were investigated by using Atomic Force Microscope and Nano-Scratch Tester. Influences of arc voltage, substrate bias voltage, target materials and substrate pre-treatment methods upon the film structures and film properties were studied.
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie
N. Jiang et al., "Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition", Materials Science Forum, Vols. 475-479, pp. 3901-3904, 2005