Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

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Diamond like carbon (DLC) films were prepared on Si wafer, using laser induced arc deposition (Laser arc) technique. Results of Raman Spectra analysis showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological properties were investigated by using Atomic Force Microscope and Nano-Scratch Tester. Influences of arc voltage, substrate bias voltage, target materials and substrate pre-treatment methods upon the film structures and film properties were studied.

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Periodical:

Materials Science Forum (Volumes 475-479)

Main Theme:

Edited by:

Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie

Pages:

3901-3904

Citation:

N. Jiang et al., "Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition", Materials Science Forum, Vols. 475-479, pp. 3901-3904, 2005

Online since:

January 2005

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$38.00

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