Study of Erbium Oxidation by XPS and UPS


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X-ray and UV photoelectron spectroscopy (XPS and UPS were used for studying the oxidation of Er films deposited on Ta substrate under ultra-high vacuum.Oxidation has been carried out at room temperatue with an oxygen pressure of 2x10-5 mbar.Erbium exposition to oxygen produces ; Er2O3 and a hydoxide.Subjecting the sample to a post annealing treatment at 750 °C dissociates the hydroxide and produces additional Er2O3.UPS and XPS valence band gives evidence that the formed oxide is Er2O3.



Materials Science Forum (Volumes 480-481)

Edited by:

A. Méndez-Vilas




N. Guerfi et al., "Study of Erbium Oxidation by XPS and UPS", Materials Science Forum, Vols. 480-481, pp. 193-196, 2005

Online since:

March 2005




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