Nucleation Control in FLASIC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Abstract:

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The influence of the different additions to the melt on the nucleation behavior during short time flash lamp processing was investigated. It was observed that germanium and carbon additions to the silicone melt led to an increase of the mass transport to the growing surface and to an increase of the nuclei size. In the case of germanium additions to the silicon melt an incorporation of germanium in the silicon substrate was observed.

Info:

Periodical:

Materials Science Forum (Volumes 483-485)

Edited by:

Roberta Nipoti, Antonella Poggi and Andrea Scorzoni

Pages:

213-216

DOI:

10.4028/www.scientific.net/MSF.483-485.213

Citation:

J. Pezoldt et al., "Nucleation Control in FLASIC Assisted Short Time Liquid Phase Epitaxy by Melt Modification", Materials Science Forum, Vols. 483-485, pp. 213-216, 2005

Online since:

May 2005

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Price:

$35.00

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