SiC Crystal Growth by Sublimation Method with Modification of Crucible and Insulation Felt Design


Article Preview

SiC crystal boules with different shapes were prepared using sublimation physical vapor transport technique (PVT) and then their crystal quality was systematically investigated. The temperature distribution in the growth system and the crystal shape were controlled by modification of crucible and insulation felt design, which was successfully simulated using “Virtual Reactor” for flat structure design and concave structure design. The SiC polytype proved to be the n-type 6H-SiC from the typical absorption spectrum of SiC crystal. The defect density of SiC crystal boules with concave structure was slightly lower than that of flat structure and the crystal quality of SiC crystal boules with both flat structure and concave structure was significantly improved as the SiC crystal grows during the PVT methods.



Materials Science Forum (Volumes 483-485)

Edited by:

Dr. Roberta Nipoti, Antonella Poggi and Andrea Scorzoni




J. K. Kim et al., "SiC Crystal Growth by Sublimation Method with Modification of Crucible and Insulation Felt Design", Materials Science Forum, Vols. 483-485, pp. 47-50, 2005

Online since:

May 2005




[1] P. G. Neudeck, D. J. Larkin, J.E. Starr, J.A. Powell, C.S. Salupo and L.G. Matus: IEEE Electron Device Letters, Vol. 14 (1993), p.136.

[2] Z. Herro, M. Bickermann, B.M. Epelbaum, P. Masri and A. Winnacker: Mater. Sci. Forum. Vol. 433-436, (2003), p.67.


[3] Y. Kitou, W. Bahng, T. Kato, S. Nishizawa and K. Arai: Mater. Sci. Forum. Vol. 389-393 (2002), p.83.

[4] M. V. Bogdanov, A. O. Galyukov, S. Yu. Karpov, A.V. Kulik, S. K. Kochuguev, D. Kh. Ofengeim, A. V. Tsiryulnikov, M. S. Ramm, A. I. Zhmakin and Yu. N. Makarov: J. Cryst. Growth Vol. 225 (2001), p.307.


[5] I. D. Matukov, D. S. Kalinin, M. V. Bogdanov, S. Yu. Karpov, D. Kh. Ofengeim, M. S. Ramm, J. S. Barash, E. N. Mokhov, A. D. Roenkov, Yu. A. Vodakov, M. G. Ramm, H. Helava and Yu. N. Makarov: Mater. Sci. Forum. Vol. 457-460 (2004), p.63.


[6] R. Weingartner, P. J. Wellmann, M. Bickermann, D. Hofmann and T. L. Straubinger: Appl. Phys. Lett., Vol. 80 (1) (2002), p.70.

[7] P. J. Wellmann and R. Weingartner: Mater. Sci. Eng. Vol. B102 (2003), p.262 SiC Crystal (a) HR image of 6H-SiC 15. 1 Å (b) (c).