Electron Paramagnetic Resonance of Shallow Phosphorous Centers in 4H- and 6H-SiC


Article Preview

Electron paramagnetic resonance (EPR) was used to study 4H- and 6H-SiC doped with P during chemical vapour deposition (CVD) growth. In 6H-SiC, three spectra with C3v symmetry and spin S=1/2, labelled Ph, Pc1 and Pc2, were detected. The g-values and the 31P hyperfine (hf) constants were determined for Ph: g||=2.0046, g^=2.0028, and A||=0.103 mT, A^<0.05 mT; for Pc1: g||=2.0039, g^=2.0025, and A||=0.615 mT, A^=0.43 mT; for Pc2: g||=2.0038(5), g^=2.0025, and A||=0.40 mT, A^=0.22 mT. The hf interaction with nearest 13C neighbours were also observed for the Pc1 and Pc2 centers, confirming that in CVD grown material the shallow P donor occupies the Si site. The Ph, Pc1 and Pc2 centers are assigned to the ground states of the shallow P at the hexagonal (Ph) and quasi-cubic sites (Pc1 and Pc2) in 6H-SiC. In 4H-SiC, an EPR spectrum of C3v symmetry with a larger anisotropy in the g-values (g||=2.0065 and g^=2.0006) was observed. The temperature dependence of the spectrum is similar to that of Ph in the 6H polytype. Its 31P hyperfine constants are determined as A||=0.294 mT and A^=0.21 mT.



Materials Science Forum (Volumes 483-485)

Edited by:

Dr. Roberta Nipoti, Antonella Poggi and Andrea Scorzoni




N. T. Son et al., "Electron Paramagnetic Resonance of Shallow Phosphorous Centers in 4H- and 6H-SiC", Materials Science Forum, Vols. 483-485, pp. 515-518, 2005

Online since:

May 2005




[1] A.I. Veinger, A.G. Zabrodskii, G.A. Lomakina, and E.N. Mokhov, Sov. Phys. Solid State 28 (1986), p.917.

[2] E.N. Kalabukhoba, S.N. Lukin, and E.N. Mokhov, Phys. Solid State 35 (1993), p.361.

[3] S. Greulich-Weber, Phys. Stat. Sol. (a) 162 (1997), p.95, and references therein.

[4] P.G. Baranov, I.V. Ilyn, E.N. Mokhov, H.J. von Bardeleben, and J.L. Cantin, Phys. Rev. B 66 (2002), p.165206.

[5] J. Isoya, T. Ohshima, A. Ohi, N. Morishita, and H. Itoh, Nucl. Instr. Meth. Phys. Res. B 206 (2003), p.965.

[6] J. Isoya, T. Ohshima, N. Morishita, T. Kamiya, H. Itoh, and S. Yamasaki, Physica B 340-342 (2003), p.903.

DOI: https://doi.org/10.1016/j.physb.2003.09.097

[7] M.V.B. Pinheiro, S. Greulich-Weber, and J. -M. Spaeth, Physica B 340-342 (2003), p.146.

[8] K. Semmelroth, F. Schmid, D. Karg, G. Pensl, M. Maier, S. Greulich-Weber, and J. -M- Spaeth, Mater. Sci. Forum 433-436 (2003), p.63.

DOI: https://doi.org/10.4028/www.scientific.net/msf.433-436.63

[9] E. Rauls, M.V.B. Pinheiro, S. Greulich-Weber, and U. Gerstmann, Phys. Rev. B. 70 (2004), p.85202.

[10] A. Henry and E. Janzén, this conference.

[11] N.T. Son, B. Magnusson, Z. Zolnai, A. Ellison, and E. Janzén, Mater. Sci. Forum 457-460 (2004), p.437.

DOI: https://doi.org/10.4028/www.scientific.net/msf.457-460.437

Fetching data from Crossref.
This may take some time to load.