Study of Carbon in Thermal Oxide Formed on 4H-SiC by XPS

Abstract:

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In this work, we present results on the study of bonding and concentration of carbon in 4H-SiC MOS structure by x-ray photoelectron spectroscopy (XPS). The XPS spectra were fitted by several Gaussian lineshape functions. It is found that the so-called carbon clusters (C-C bonds) appear at the interface of SiO2/SiC, but are not seen in the oxide bulk. However, there are still some SiOxCy and Si-C bonds inside the oxide and the integrated area ratio of SiOxCy/Si-C bonds increases when further away from the SiO2/SiC interface. These observations can be interpreted in terms of the dynamic oxidation process that transforms Si-C bonds into SiOxCy bonds, which are then further oxidized to form SiO2 bonds.

Info:

Periodical:

Materials Science Forum (Volumes 483-485)

Edited by:

Roberta Nipoti, Antonella Poggi and Andrea Scorzoni

Pages:

653-656

DOI:

10.4028/www.scientific.net/MSF.483-485.653

Citation:

P. Zhao et al., "Study of Carbon in Thermal Oxide Formed on 4H-SiC by XPS", Materials Science Forum, Vols. 483-485, pp. 653-656, 2005

Online since:

May 2005

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Price:

$35.00

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