Substrate Bias Effects on the Structure of the Film by a Hybrid PVD and Plasma-Based Ion Implantation Process

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This paper descirbes the characteristics of gold films prepared by a hybrid plasma based an ion implantation/deposition (PBIID) system. The surface morphology and structure of the film were affected by the voltage applied to the target. With increasing negative voltage, the surface became thinner with a lesser number of nuclei. The grain structure varied from the continuous film at 0 kV to the channel at -1 kV, and further to the islands (mounds) at -5 kV. The ions in the sheath are believed to play an important role in the deposition of the film.

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Periodical:

Materials Science Forum (Volumes 486-487)

Edited by:

Hyung Sun Kim, Sang-Yeop Park, Bo Young Hur and Soo Wohn Lee

Pages:

452-455

Citation:

S.Y. Chun and S. J. Lee, "Substrate Bias Effects on the Structure of the Film by a Hybrid PVD and Plasma-Based Ion Implantation Process", Materials Science Forum, Vols. 486-487, pp. 452-455, 2005

Online since:

June 2005

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$38.00

[1] A. Anders, Surf. Coat. Technol. 93 (1997), p.158.

[2] A. Anders, Handbook of Plasma Immersion Ion Implantation and Deposition, (John Wiley & Sons, New York 2000).

[3] J.R. Roth, Industrial Plasma Engineering, (Institute of Physics and Publishing, London 2001).

[4] S. Mukherjee. H. Reuther, F. Prokert, E. Richter, W. Moeller, Surf. Coat. Technol. 160 (2002), p.93.

[5] S.Y. Chun, A. Chayahara, Y. Horino, Appl. Surf. Sci. 169/170 (2001), p.607.

[6] E. Hantzsche, IEEE Trans. Plasma Sci. 34 (1992), p.34.

[7] K. Yukimura, F. Kuze, M. Kumagai, T. Maruyama, M. Kohata, K. Numata, H. Saito, X. Ma, Surf. Coat. Technol. 169-170 (2003), p.472.

[8] M. Sugawara, Plasma Etching, (Oxford University Press, New York 1998).

[9] M. Ohring, Materials Science of Thin Films, (Academic Press, New York 2002).

[10] N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, and H. Tawara, At. Data Nucl. Data Tables 31 (1984), p.1.

DOI: https://doi.org/10.1016/0092-640x(84)90016-0

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