Analysis of the residual stress state, the microstructure and surface topography of ceramic microcomponents made of Y2O3-stabilized ZrO2 produced by micro powder injection moulding were performed. During the production of the microspecimens sintering conditions were varied. The measurement of residual stresses has been carried out using the MAXIM (MAterials XRay IMaging) diffractometer at HASYLAB beamline G3 at DESY in Hamburg (Germany). The microstructure and surface topography of differently moulded specimens were examined using a scanning electron microscope (SEM) and a confocal white light microscope type NANOFOCUS. The findings are used to establish correlations between process parameters and characteristics of the microcomponents. These will allow to improve the production process with respect to the mechanical properties of the microcomponents.