Neutralization of Ion Beams for Reduction of Charging Damage in Plasma Etching

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Neutral beams were proposed for plasma etching in order to reduce damage due to charging. We analyzed the efficiency of neutralization in a system proposed recently where a beam of ions was neutralized in the gas phase and in a set of narrow tubes. We studied surface neutralization as well as collisions of ions in the gas. In the case of collisions of ions with aperture walls, efficiency of neutralization was assumed to be 100%. We also investigated the influence of various parameters such as aperture length, tube diameter and initial ion energy on the efficiency of neutralization using a Monte Carlo code for ion motion simulation. In our calculations we used a well-established set of cross sections for argon.

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Periodical:

Edited by:

Dragan P. Uskokovic, Slobodan K. Milonjic, Djan I. Rakovic

Pages:

297-302

DOI:

10.4028/www.scientific.net/MSF.494.297

Citation:

A. Nina et al., "Neutralization of Ion Beams for Reduction of Charging Damage in Plasma Etching", Materials Science Forum, Vol. 494, pp. 297-302, 2005

Online since:

September 2005

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$35.00

[1] R.A. Gottscho, C.W. Jurgensen, D.J. Vitkavage, J. Vac. Sci. Technol., B 10 (1992), p.2133.

[2] J. Matsui, N. Nakano, Z. Lj. Petrović and Toshiaki Makabe, Appl. Phys. Lett., 78 (2001), p.883.

[3] S. Murakawa and J.P. McVittie, Jpn.J. Appl. Phys., 33 (1994), p.2184.

[4] S. Samukawa, H. Othake and T. Mieno, J. Vac. Sci. Technol., A 14 (1996), p.3049.

[5] Z. Lj. Petrović and A.V. Phelps, Proceedings of the International Seminar on Reactive Plasmas 1991 Ed. T. Goto, Nagoya, (1991), p.351.

[6] Z. Lj. Petrović and V.D. Stojanović, J. Vac. Sci. Technol, A 16 (1998), p.329.

[7] D. A. Scott and A. V. Phelps, Phys. Rev., A 43 (1991), p.3043.

[8] S. Samukawa, K. Sakamoto, K., Ichiki, J. Vac. Sci. Technol., A 20 (2002), p.1.

[9] S. Panda, D.J. Economou and L. Chen, J. Vac. Sci. Technol., A 19 (2001), p.398.

[10] E.W. Thomas In Applied Atomic and Collision Physics, Vol. 4 Ed. H. Massey and B. Burhop (Academic Press, New York) (1983), p.299.

[11] Z. Lj. Petrović, Z.M. Raspopović, S. Dujko and T. Makabe, Appl. Surf. Sci., 192 (2002), p.1.

[12] Z. Lj. Petrović, S. Sakadžić, N. Spasojević, J. Matsui, T. Makabe, Materials Sci. Forum, 453-454 (2004), p.9.

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