Three-Dimensional Texture Analysis


Article Preview

Three-dimensional (3D) microscopy is a new and rapidly expanding area. A DualBeam system, with both a focused ion beam (FIB) column and an electron column, is a powerful instrument for imaging and sectioning microstructures to generate a full 3D sample reconstruction. When an electron backscatter diffraction (EBSD) system is attached to the DualBeam, it becomes a unique tool for making 3D crystallographic measurements on a wide variety of materials. Combining the successive removal by FIB, with sequential EBSD maps taken with the electron beam requires clear geometric considerations and a high level of automation to obtain a decent resolution in the third dimension, including positional sub-pixel re-alignment. Complete automation allows controlled sectioning and analysis of a significant volume of material without operator intervention: a process that may run continuously and automatically for many hours. Using a Nova600, a Channel 6 EBSD system and dedicated control software, Aluminium, Nickel and Steel specimens have been examined and volumes with up to 200 slices have been successfully analysed.



Materials Science Forum (Volumes 495-497)

Edited by:

Paul Van Houtte and Leo Kestens




J.J.L. Mulders and A.P. Day, "Three-Dimensional Texture Analysis", Materials Science Forum, Vols. 495-497, pp. 237-244, 2005

Online since:

September 2005




[1] Peter R. Buseck, et al., Magnetite morphology and life on Mars, PNAS, November 20, vol. 98, no. 24, pp.13490-13495, 2001. Available on-line at: http: /www. pnas. org/cgi/content/full/98/24/13490.

[2] Søren Schmidt, et al., In-situ measurements of nuclei within the bulk of deformed Al…, Materials Science Forum, Vols. 467-470, pp.189-192, (2004).


[3] T.L. Matteson, S.W. Schwartz, E.C. Houge, B.W. Kempshall, and L.A. Giannuzzi: Journal of Electronic Materials, Vol. 31, No. 1, (2002).

[4] V. Sivel, NIMR, Rotterdam, The Netherlands, private communication.

[5] G.S. Rohrer, D.M. Saylor, B.S. El-Dasher, B.L. Adams, A.D. Rollett, and P. Wynblatt, The Distribution of Internal Interfaces in Polycrystals, Zeitschrift fur Metallkunde, 95, pp.197-214.