Developing a Moving-Coil Actuator for Nano-Imprint Lithography System
Nano-imprint lithography (NIL) is one of the most promising technologies for the massproduction of nano-meter patterns. A commercial hydraulic press and a pair of hot plates were used as the NIL system reported so far. It is, however, large and heavy. In this paper, therefore, a new moving-coil actuator is proposed and is intended to be used as the driving power for a compact NIL system. Compared to the commercial hydraulic NIL system, two advantages of the new NIL system using the moving-coil actuator are the ease of precise control as well as the compact dimensions. Thus, it is suitable for the fabrication and replication of small-sized nano-meter patterns. To develop such a new moving-coil actuator, the electromagnetic finite element method (FEM) is utilized. In addition, a simple but effective state-space model is also established to describe the dynamic behavior of the moving-coil actuator. Finally, a series of simulations and experiments are carried out and the results show that the positioning accuracy of the developed moving-coil actuator is 1µm.
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
J. C. Renn et al., "Developing a Moving-Coil Actuator for Nano-Imprint Lithography System", Materials Science Forum, Vols. 505-507, pp. 1027-1032, 2006